Early Identification of Patterning Errors in the Fabrication Process of Diffraction Gratings

Sofia C. Corzo-Garcia; Ulf Griesmann

doi:10.1364/FREEFORM.2019.JT5A.7

Optical Design and Fabrication 2019 (Freeform, OFT)
OSA Technical Digest (Optica Publishing Group, 2019),
paper JT5A.7
•https://doi.org/10.1364/FREEFORM.2019.JT5A.7

Early Identification of Patterning Errors in the Fabrication Process of Diffraction Gratings

Sofia C. Corzo-Garcia and Ulf Griesmann

Optical Fabrication and Testing 2019

Washington, DC United States
10–12 June 2019
ISBN: 978-1-943580-60-6

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S. C. Corzo-Garcia and U. Griesmann, "Early Identification of Patterning Errors in the Fabrication Process of Diffraction Gratings," in Optical Design and Fabrication 2019 (Freeform, OFT), OSA Technical Digest (Optica Publishing Group, 2019), paper JT5A.7.

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Abstract

We describe a focal plane imager with high dynamic range for the detection of fabrication errors that occur in the lithographic fabrication of diffraction gratings.

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