Improved Methods for Evaluating Metrology Data Against Optical Specifications

Paul E. Murphy

doi:10.1364/OFT.2017.OM3B.4

Optical Design and Fabrication 2017 (Freeform, IODC, OFT)
OSA Technical Digest (online) (Optica Publishing Group, 2017),
paper OM3B.4
•https://doi.org/10.1364/OFT.2017.OM3B.4

Improved Methods for Evaluating Metrology Data Against Optical Specifications

Paul E. Murphy

Optical Fabrication and Testing 2017

Denver, Colorado United States
9–13 July 2017
ISBN: 978-1-943580-31-6

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P. E. Murphy, "Improved Methods for Evaluating Metrology Data Against Optical Specifications," in Optical Design and Fabrication 2017 (Freeform, IODC, OFT), OSA Technical Digest (online) (Optica Publishing Group, 2017), paper OM3B.4.

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Abstract

More elaborate surface specifications complicate the evaluation and presentation of quality control results. We introduce a new “notebook” framework for analyzing metrology data against specifications, and demonstrate its use on ISO form and slope specifications.

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