Using the random ball test to calibrate slope dependent errors in optical profilometry

Yue Zhou; John Troutman; Christopher Evans; Angela Davies

doi:10.1364/OFT.2014.OW4B.2

Classical Optics 2014
OSA Technical Digest (online) (Optica Publishing Group, 2014),
paper OW4B.2
•https://doi.org/10.1364/OFT.2014.OW4B.2

Using the random ball test to calibrate slope dependent errors in optical profilometry

Yue Zhou, John Troutman, Christopher Evans, and Angela Davies

Optical Fabrication and Testing 2014

Kohala Coast, Hawaii United States
22–26 June 2014
ISBN: 978-1-55752-747-9

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Testing - Calibration (OW4B)

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Y. Zhou, J. Troutman, C. Evans, and A. Davies, "Using the random ball test to calibrate slope dependent errors in optical profilometry," in Classical Optics 2014, OSA Technical Digest (online) (Optica Publishing Group, 2014), paper OW4B.2.

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Abstract

Optical profilometers are susceptible to slope-dependent errors. The random ball test can be used for calibrating such errors. We demonstrate such a calibration on a 50× confocal microscopy in this paper.

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