Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

New Phase Measuring Deflectometry Device for Mid-to-High Spatial Frequency Surface Metrology

Not Accessible

Your library or personal account may give you access

Abstract

We present a new high resolution deflectometry technique for mid-to-high spatial frequency measurements of precision optical surfaces. This metrology technique was verified to be accurate to within 1 nm RMS, and repeatable to 300 nrad.

© 2014 Optical Society of America

PDF Article
More Like This
Optical Metrology Systems Spanning the Full Spatial Frequency Spectrum

Dae Wook Kim, Maham Aftab, Heejoo Choi, Logan Graves, and Isaac Trumper
FW5G.4 Frontiers in Optics (FiO) 2016

Study of camera lens effects for a deflectometry surface measurement system: SCOTS

Run Huang, Peng Su, Tianquan Su, Weirui Zhao, and James H. Burge
JTu5A.7 Computational Optical Sensing and Imaging (COSI) 2014

Meter-Class Infrared Deflectometry for Visibly Non-Specular Surface Metrology

Joel Berkson, Zack Hatfield, Alex St. Peter, Henry Quach, Emily Rodriguez, Naomi Nguyen, Wyatt Ellis, Kevin Derby, Christian Davila-Peralta, Justin Hyatt, and Dae Wook Kim
JTu2B.3 Freeform Optics (Freeform) 2021

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved