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Conferences > OFT > 2014 > OM4B > OM4B.4

Ion Beam Technology: Figuring, Smoothing and Adding for High-precision Optics

Lin Zhou, Shengyi Li, Wenlin Liao, Hao Hu, Yifan Dai, and Xuhui Xie

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Abstract

Besides conventional ion beam figuring process, ion beam adding has been proposed and applied in optical fabrication. Ion beam smoothing processes, especially on fuse silica and Zerodur are discussed, and ultra-smooth surfaces are achieved.

© 2014 Optical Society of America

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