Dressed Photon-Phonon Polishing for Ultra-Smooth Surfaces

Takashi Yatsui

doi:10.1364/OFT.2014.OM4B.1

Classical Optics 2014
OSA Technical Digest (online) (Optica Publishing Group, 2014),
paper OM4B.1
•https://doi.org/10.1364/OFT.2014.OM4B.1

Dressed Photon-Phonon Polishing for Ultra-Smooth Surfaces

Takashi Yatsui

Optical Fabrication and Testing 2014

Kohala Coast, Hawaii United States
22–26 June 2014
ISBN: 978-1-55752-747-9

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Figuring and Finishing Science (OM4B)

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T. Yatsui, "Dressed Photon-Phonon Polishing for Ultra-Smooth Surfaces," in Classical Optics 2014, OSA Technical Digest (online) (Optica Publishing Group, 2014), paper OM4B.1.

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Abstract

This paper describes the mechanism of dressed photon-phonon (DPP) generation. Recent progress in ultrafine fabrication technologies using DPPs is reviewed, including DPP-photochemical etching and desorption, which can be used to produce angstrom-scale flat surfaces.

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