Abstract
Light scattering measurements are used to determine surface PSD functions and application-specific roughness values in different relevant spatial frequency ranges. A new method is presented for area covering investigations of the high-spatial frequency roughness.
© 2012 Optical Society of America
PDF ArticleMore Like This
Tobias Herffurth, Sven Schröder, Marcus Trost, and Angela Duparré
OTuA5 Optical Fabrication and Testing (OF&T) 2010
Marcus Trost, Sven Schröder, and Angela Duparré
OTh3B.6 Optical Fabrication and Testing (OF&T) 2014
T.V. Vorburger, T.R. Lettieri, and Egon Marx
SMB3 Surface Roughness and Scattering (SURS) 1992