Abstract
A number of methods are available to measure surface finish; methods of stylus profiling and optical profiling are emphasized here. Documentary standards for measurement of surface texture and comparisons between methods are also discussed.
© 2010 OSA, SPIE
PDF ArticleMore Like This
F. Zernike
OF94 Extreme Ultraviolet Lithography (EUL) 1996
F. Zernike
JThA.1 Optical Fabrication and Testing (OF&T) 1996
T. Vorburger, T. McWaid, J. Fu, C.J. Evans, W.T. Estler, and R.E. Parks
TuB.4 Soft X-Ray Projection Lithography (SXRAY) 1993