Ultrasonic Vibration Assisted Polishing of Micro Aspherical Molds

Hirofumi Suzuki

doi:10.1364/OFT.2008.OTuB2

Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing
OSA Technical Digest (CD) (Optica Publishing Group, 2008),
paper OTuB2
•https://doi.org/10.1364/OFT.2008.OTuB2

Ultrasonic Vibration Assisted Polishing of Micro Aspherical Molds

Hirofumi Suzuki

Optical Fabrication and Testing 2008

Rochester, New York United States
21–24 October 2008
ISBN: 978-1-55752-861-2

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Molded Optics (OTuB)

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H. Suzuki, "Ultrasonic Vibration Assisted Polishing of Micro Aspherical Molds," in Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing, OSA Technical Digest (CD) (Optica Publishing Group, 2008), paper OTuB2.

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Abstract

Ultrasonic vibration assisted polishing method with piezo-electric actuators was proposed and 4- axes (X,Y,Z,B) controlled machine was developed in order to finish the aspherical molds/dies of steep angles. In the experiment, the tungsten carbide molds was polished.

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