Abstract
The plasma-induced material removal based on chemical mechanisms depends on surface temperature. The temperature field caused by the jet heat flux is modeled by FEM to predict the local etching behavior during large surface machining.
© 2008 Optical Society of America
PDF ArticleMore Like This
G. Böhm, I.-M. Eichentopf, and Th. Arnold
OThD4 Optical Fabrication and Testing (OF&T) 2008
Thomas Arnold, Georg Boehm, and Hendrik Paetzelt
FTh1B.3 Freeform Optics (Freeform) 2015
Yazid Tohme
OThC6 Optical Fabrication and Testing (OF&T) 2008