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  • Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper JWD11
  • https://doi.org/10.1364/OFT.2008.JWD11

Ultra-Fast Self-corrected PEM Ellipsometry

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Abstract

A self-corrected method is proposed for PEM Ellipsometry. This algorithm can eliminate errors caused by the temporal deviation (x) and achieve δψ–0.14° and δΔ–0.25° in 20μs, respectively.

© 2008 Optical Society of America

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