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Conferences > OFT > 2006 > OFMB > OFMB1

Reactive Atom Plasma Processing for Lightweight SiC Mirrors

Peter S. Fiske, Yogesh Verma, Andrew Chang, Nick Lyford, Jude Kelley, Phil Sommer, Ning Li, Kurt Pang, George Gardopee, Tom Kyler, and John Berrett

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Abstract

Reactive Atom Plasma (RAP) is a plasma-based tool for rapid damage-free shaping of optical surfaces. We discuss our success rapidly shaping and finishing advanced lightweight SiC mirrors using an integrated manufacturing process that includes RAP.

© 2006 Optical Society of America

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