Applications of iTIRM

Mark Meeder; Oliver W. Fähnle

doi:10.1364/OFT.2004.OTuC3

Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
OSA Technical Digest (CD) (Optica Publishing Group, 2004),
paper OTuC3
•https://doi.org/10.1364/OFT.2004.OTuC3

Applications of iTIRM

Mark Meeder and Oliver W. Fähnle

Optical Fabrication and Testing 2004

Rochester, New York United States
11–13 October 2004
ISBN: 1-55752-779-2

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M. Meeder and O. W. Fähnle, "Applications of iTIRM," in Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing, OSA Technical Digest (CD) (Optica Publishing Group, 2004), paper OTuC3.

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Abstract

In-process surface measurement using the iTIRM principle is used for the optimisation and study of finishing processes and for the analysis of contaminated polishing processes. Furthermore, its possible application to detect scratch and dig is demonstrated.

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