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  • Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper OTuB2
  • https://doi.org/10.1364/OFT.2004.OTuB2

Vibration Insensitive Interferometric Optical Testing

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Abstract

The measurement accuracy of an interferometric optical test is generally limited by the environment. This paper discusses two single-shot interferometric techniques for reducing the sensitivity of an optical test to vibration; simultaneous phase-shifting interferometry and spatial carrier interferometry.

© 2004 Optical Society of America

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