Abstract

We summarize three development efforts in view of improving the state of the art for laser Fizeau interferometers for testing optical components. The first is a novel ring-shaped geometry for the laser source resulting in significantly reduced coherent artifacts without loss of fringe contrast over a wide measurement range. We then outline a commercial product designed to resolve much higher slopes than normal, which incorporates this novel ring-shaped source geometry. The third is a new approach, incorporating wavelength tuning with novel analysis techniques capable of simultaneous measurement of multiple surfaces and optical characteristics of sample parts, including homogeneity, without surface treatments that are normally needed to defeat unwanted internal Fizeau interference. These developments are intended to improve the functionality, precision and usefulness of this very important metrology tool.

© 2002 Optical Society of America