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Conferences > OFT > 2002 > OTuB > OTuB5

Ion Beam Finishing Technology for High Precision Optics Production

A. Schindler, T. Hänsel, F. Frost, R. Fechner, G. Seidenkranz, A. Nickel, H.-J. Thomas, H. Neumann, D. Hirsch, R. Schwabe, G. Seidenkranz, and K. Barucki

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Abstract

A new company-Nanotechnologie Leipzig GmbH - NTGL - is now offering ion beam figuring production equipment including the technology for high precision optics finishing for customized solutions.

A prototype ion beam figuring (IBF) plant “UPFA-1” mature for optics production requirements has been developed and established in the R&D application and service lab of the IOM institute.

A dwell time algorithm based local ion beam etching technology using a Gaussian shaped beam density profile is used for the local surface shape correction of optical elements.

© 2002 Optical Society of America

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