Abstract
Multilayer coatings with high damage resistance at I 054 nm can be produced with a metallic hafnium starting material and silicon dioxide (the damage characteristics of these coatings are discussed in detail in a companion paper submitted to this conference). These films have the potential of exhibiting good performance for a high fluence laser if all other optical specifications can be met by the coating. This paper discusses the methods used to prepare a large substrate and coat it with a multilayer meeting damage, spectral, surface flatness, and uniformity specifications.
© 2002 Optical Society of America
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