Optical Reference Profilometry

Stephan R. Clark; John E. Greivenkamp; Ralph M. Richard; José M. Sasian

doi:10.1364/OFT.2000.OTuB2

Optical Fabrication and Testing
OSA Technical Digest (Optica Publishing Group, 2000),
paper OTuB2
•https://doi.org/10.1364/OFT.2000.OTuB2

Optical Reference Profilometry

Stephan R. Clark, John E. Greivenkamp, Ralph M. Richard, and José M. Sasian

Optical Fabrication and Testing 2000

Québec City Canada
ISBN: 1-55752-637-0

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New Metrology Methods (OTuB)

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S. R. Clark, J. E. Greivenkamp, R. M. Richard, and J. M. Sasian, "Optical Reference Profilometry," in Optical Fabrication and Testing, OSA Technical Digest (Optica Publishing Group, 2000), paper OTuB2.

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Abstract

The design of a second-generation optical reference profilometer that addresses stability and mechanical linkage issues is presented. The goal is to improve accuracy and long-term measurement stability.

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