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Conferences > OFS > 2018 > TuE > TuE47

Fabrication of diaphragm in alumina ceramic tube by CO2 laser for pressure sensing

Lei Xiao, Fufei Pang, Huanhuan Liu, Zhangwei Ma, Leilin Huang, Shi Shen, Zhenyi Chen, Na Chen, and Tingyun Wang

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Abstract

We have demonstrated the fabrication of diaphragm in rotating alumina ceramic tube by CO2 laser for the first time. A diaphragm-air gap-SMF Fabry-Perot interferometer is constructed for pressure sensing shows a sensitivity of 1.02 nm/MPa.

© 2018 The Author(s)

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