Abstract
The optical fiber sensor for deposition thickness is described. The microcantilever of quartz core which was fabricated with etching a clad from an optical fiber tip was vibrated photothermally. After deposition of the Au layer on the cantilever, the resonance frequency of this cantilever was measured. The decreasing rate of the resonance frequency was about 0.9Hz/nm.
© 1996 IEICE
PDF ArticleMore Like This
Hironori Kumazaki, Soya Shiraki, and Masahiro Ogawa
WF33 Optical Fiber Sensors (OFS) 2018
Selim Olcum, Ertugrul Karademir, Vahdettin Tas, Imran Akca, Askin Kocabas, Abdullah Atalar, and Atilla Aydinli
CK11_5 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2009
Jing Liu, Huan He, Shuyan Chen, Zhiyong Zhao, and Ming Tang
Th6.62 Optical Fiber Sensors (OFS) 2023