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OPTICAL SENSOR FOR DEPOSITION THICKNESS USING MICROCANTILEVER FABRICATED FROM OPTICAL FIBER

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Abstract

The optical fiber sensor for deposition thickness is described. The microcantilever of quartz core which was fabricated with etching a clad from an optical fiber tip was vibrated photothermally. After deposition of the Au layer on the cantilever, the resonance frequency of this cantilever was measured. The decreasing rate of the resonance frequency was about 0.9Hz/nm.

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