Abstract

Monolithically integrated optical devices on a laser wafer can be used to construct the optical microsensors that will be used in high-performance mechanical systems like future micromachines. The elements in these devices are precisely arranged by the use of lithography. In this papaer, we propose a focus-sensing laser that has a monolithic 3-channel laser diode (LD) array with vertically displaced facets. This device operates with lenses and an external mirror, and we expect it to be used not only in vertical sensing systems but also in optical disk systems.

© 1992 Optical Society of America