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Differential, Reflective Fiber Displacement Sensor with Misalignment Compensation

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Abstract

Position sensors form the basis of a wide variety of applications in mechanical metrology and feedback control in areas such as lithography, robotics, and precision manufacturing. The novel optical displacement sensor to be described achieves very high resolution simply and constitutes an alternative to interferometers with easier construction, lower cost and bulk, and improved ruggedness. It is also self-compensating for angular misalignment.

© 1985 Optical Society of America

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