A Metalens Array on a 12-inch Glass Wafer for Optical Dot Projection

Ting Hu; Qize Zhong; Nanxi Li; Yuan Dong; Zhengji Xu; Dongdong Li; Yuan Hsing Fu; Yanyan Zhou; Keng Heng Lai; Vladimir Bliznetsov; Hou-Jang Lee; Wei Loong Loh; Shiyang Zhu; Qunying Lin; Navab Singh

doi:10.1364/OFC.2020.W4C.3

Optical Fiber Communication Conference (OFC) 2020
OSA Technical Digest (Optica Publishing Group, 2020),
paper W4C.3
•https://doi.org/10.1364/OFC.2020.W4C.3

A Metalens Array on a 12-inch Glass Wafer for Optical Dot Projection

Ting Hu, Qize Zhong, Nanxi Li, Yuan Dong, Zhengji Xu, Dongdong Li, Yuan Hsing Fu, Yanyan Zhou, Keng Heng Lai, Vladimir Bliznetsov, Hou-Jang Lee, Wei Loong Loh, Shiyang Zhu, Qunying Lin, and Navab Singh

Optical Fiber Communication Conference 2020

San Diego, California United States
8–12 March 2020
ISBN: 978-1-943580-71-2

From the session
Novel Passive Devices (W4C)

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T. Hu, Q. Zhong, N. Li, Y. Dong, Z. Xu, D. Li, Y. H. Fu, Y. Zhou, K. H. Lai, V. Bliznetsov, H. Lee, W. L. Loh, S. Zhu, Q. Lin, and N. Singh, "A Metalens Array on a 12-inch Glass Wafer for Optical Dot Projection," in Optical Fiber Communication Conference (OFC) 2020, OSA Technical Digest (Optica Publishing Group, 2020), paper W4C.3.

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Abstract

We report the first demonstration of a metalens array fabricated on a 12-inch glass wafer for dot projection. Good uniformity in dot size is achieved, with a maximum deviation of 8% to the simulated value.

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