A novel alignment insensitive, opto-electronical probe card for wafer level PIC testing to use with common high volume wafer probers and automated test equipment is presented to reduce cost and cycle time.

© 2019 The Author(s)

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription