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Conferences > OFC > 2017 > W2A > W2A.4

Hybrid integration of modified uni-traveling carrier photodiodes on a multi-layer silicon nitride platform using total internal reflection mirrors

Shaoqi Feng, Yang Shen, Xiaojun Xie, Jizhao Zang, Siwei Li, Tiehui Su, Kuanping Shang, Weicheng Lai, Guangyao Liu, Joe C. Campbell, and S. J. Ben Yoo

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Abstract

We demonstrate hybrid integration of modified uni-traveling carrier photodiodes on a multi-layer silicon nitride platform using total internal reflection mirrors. Low-loss high-efficiency coupling of InGaAs detector on a silicon substrate has been realized.

© 2017 Optical Society of America

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