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Conferences > OFC > 2016 > W2A > W2A.22

Photonic Integrated Circuits: a Study on Process Variations

Mahdi Nikdast, Gabriela Nicolescu, Jelena Trajkovic, and Odile Liboiron-Ladouceur

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Abstract

Developing an efficient method and applying it to study several identical microresonators fabricated by electron beam lithography, we quantify the worst-case within-die silicon thickness and resonance wavelength variations to be 1.55 and 2.11 nm, respectively.

© 2016 Optical Society of America

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