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Zero-Change CMOS Photodiode with 0.44 A/W Responsivity

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Abstract

A photodiode with 0.44 A/W has been fabricated in the Global Foundries 45 nm 12SOI process –a twenty times increase over previous results. The photodiode consists of a ring-resonator with ring-shaped silicon-germanium.

© 2016 Optical Society of America

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