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Ultra-Low Loss Vertical Optical Couplers for 3D Photonic Integrated Circuits

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Abstract

We design, fabricate, and demonstrate ultra-low loss Si3N4 vertical couplers for multilayer photonic integrated circuits. We achieve 0.05 dB coupling loss, 100×2 μm2 footprint, and vertical coupling tolerant to lateral misalignment up to 1.2 μm.

© 2015 Optical Society of America

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