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Waveguide Ge/Si Avalanche Photodetector with a Unique Low-Height-Profile Device Structure

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Abstract

We present a SACM waveguide Ge/Si APD capable of 25 Gb/s operation at 1.3 µm, with a unique low-height-profile structure which enables low dark current. A maximum sensitivity improvement of ~9 dBm can be obtained.

© 2014 Optical Society of America

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