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Horizontal Cu/SiO2/Si/SiO2/Cu Plasmonic Waveguide Components Integrated in Silicon Photonic Circuits

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Abstract

We report experimental realization of various Cu/SiO2/Si/SiO2/Cu plasmonic waveguide based building blocks, including low loss (~0.28 dB/μm) waveguides, low loss (-0.52 dB/turn) bends, power splitters, and Mach-Zehnder interferometers with ER of -18.7 dB. This is a significant step toward plasmonic nanocircuits on the Si platform.

© 2012 Optical Society of America

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