Low loss thermally nanoimprinted chalcogenide waveguides are demonstrated for the first time, uniquely using a soft PDMS stamp. Losses of 0.24dB/cm at 1550nm limited by Rayleigh scattering were achieved and embossing of As2S3 also demonstrated.

© 2010 IEEE Communications Society, IEEE Photonics Society, OSA, Telcordia

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