High-Q, low loss microdisks vertically coupled to buried bus waveguides were designed and fabricated using selective area deep etching with multi-level masks. The technology combines low loss waveguides with the ability to integrate active functionalities.

© 2008 Optical Society of America

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription