Ge rhotodetectors integrated with Waveguides tor Electronic-Photonic Integrated Circuits on CMOS Platform

Donghwan Ahn; Ching-yin Hong; Jifeng Liu; Mark Beals; Jian Chen; Franz X Kaertner; Lionel C. Kimerling; Jurgen Michel

Optical Fiber Communication Conference and Exposition and The National Fiber Optic Engineers Conference
OSA Technical Digest Series (CD) (Optica Publishing Group, 2007),
paper OThG3

Ge rhotodetectors integrated with Waveguides tor Electronic-Photonic Integrated Circuits on CMOS Platform

Donghwan Ahn, Ching-yin Hong, Jifeng Liu, Mark Beals, Jian Chen, Franz X Kaertner, Lionel C. Kimerling, and Jurgen Michel

Optical Fiber Communication Conference 2007

Anaheim, California United States
25–29 March 2007
ISBN: 1-55752-830-6

From the session
Photodetectors, Terabits and Terahertz (OThG)

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D. Ahn, C. Hong, J. Liu, M. Beals, J. Chen, F. X. Kaertner, L. C. Kimerling, and J. Michel, "Ge rhotodetectors integrated with Waveguides tor Electronic-Photonic Integrated Circuits on CMOS Platform," in Optical Fiber Communication Conference and Exposition and The National Fiber Optic Engineers Conference, OSA Technical Digest Series (CD) (Optica Publishing Group, 2007), paper OThG3.

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Abstract

Ge p-i-n photodetectors monolithically integrated with silicon oxynitride and silicon nitride waveguides on Si CMOS platform are presented. The devices demonstrated high efficiency (〜1.08A/W) and high-speed (> 14 Gbit/s) performances at low bias.

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