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  • Optical Fiber Communication Conference and Exposition and The National Fiber Optic Engineers Conference
  • Technical Digest (CD) (Optica Publishing Group, 2006),
  • paper OWH1

Monolithic Vertical Integration of Metal-Oxide-Semiconductor Transistor with Subterranean Photonics in Silicon

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Abstract

Monolithic integration of photonics and electronics has been achieved in silicon by vertically integrating Metal-Oxide-Semiconductor Field-Effect Transistors and waveguide-coupled microdisk resonators in a double-layer silicon-on-insulator wafer, thus paving the way towards dense three-dimensional optoelectronic integration.

© 2006 Optical Society of America

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