Abstract
Tunable optical filters are key components for various applications, such as dense wavelength division multiplexed (DWDM) optical networks, spectroscopy, beam steering and optical sensing. Various different structures have been reported.1–7 The micromechanically actuated optical filters are desirable because of their wide tuning range and process compatibility with other optoelectronic devices. A wide and continuous tuning range was demonstrated first in a family of micro-electro-mechanical (MEM) photonic devices using a simple cantilever structure.2–5 The devices included tunable filters, detectors and vertical cavity surface emitting lasers (VCSELs) with the last being now a commercial product from Bandwidth9, Inc. Other research teams also reported tunable photonic devices using similar cantilever structure6 or membrane structures.7
© 2002 Optical Society of America
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