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Optica Publishing Group
  • Optical Fiber Communications Conference
  • OSA Trends in Optics and Photonics (Optica Publishing Group, 2002),
  • paper TuO3

A Low Voltage, Large Scan Angle MEMS Micromirror Array with Hidden Vertical Comb-Drive Actuators for WDM Routers

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Abstract

The evolution of photonic communication networks towards optical layer networking has created a great demand for many new functional optical network elements. Microelectromechanical-systems (MEMS) is a key enabling technology for many of these new devices. Dynamic optical add-drop multiplexers (OADM), 1 2-D2 and 3-D optical crossconnect3 have been demonstrated.

© 2002 Optical Society of America

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