Abstract

We report what we believe to be the first fabrication of a three-dimensional rotatable micrograting plate for free-space integrated micro-optics by surface micromachining. A free-space micro-optical system consisting of a micrograting, a micro-Fresnel lens, and a passively aligned diode laser was also demonstrated for the first time to our knowledge. Grating plays is important in many optical systems, such as tunable external-cavity lasers, microspectrometers, optical interconnects, and wavelength-division-multiplexed (WDM) systems. Conventional gratings lie on the surface of the substrate and are not suitable for monolithic integration for free-space optical systems. In this paper we report a novel three-dimensional grating, fabricated by surface micromachining, that is similar to the micro-Fresnel lens.¹ The micrograting plate is supported by microhinges and microspring latches² and is able to stand perpendicular to the silicon substrate. Micromachining permits the microgratings to be integrated with other micro-optical elements (lenses, mirrors, etc.) and active lasers on a silicon chip.

© 1995 Optical Society of America