Optoelectronic integrated circuits (OEICs), in which optical elements are monolithically integrated with electronic circuits on a single semiconductor substrate, have become a target of research activities in recent years. This is because OEICs are ideal devices to produce compact and high-performance optical receiver and transmitter modules; they are key components to expand the application of optical fiber transmission to local area networks, CATVs, data processing systems, interconnection wiring within equipment, etc.

© 1985 Optical Society of America

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