Abstract
Slot waveguide ring resonators usually meet a bottleneck of fabrication-induced optical losses. This limitation usually results in small Q factors if compared with nanowire waveguides’ ring resonators. In the present work, the design and fabrication of improved slot ring resonators with respect to linear loss levels and achievable Q-factors are explored. The loss levels of traditional straight directional couplers (APR) and racetrack couplers (RTAPR) are compared by exactly controlling the cavity length and total loss levels, respectively. The symmetric racetrack coupler all-pass resonators (RTAPR) are finally proved to be able to bring an efficient coupling loss minimization and to result in Q-factors typically above 120,000 with the present progress of our fabrication processes. Meanwhile, the total losses are around 2dB/cm. Overall, the achieved results bring a new progress towards low loss silicon slot waveguiding structures for hybrid Si photonics including on-chip nonlinear optics and sensing.
© 2015 Optical Society of America
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