Fabrication of the porous silicon though a self-assembled porous alumina template

Zeping Li; Zeping Li; Zhimou Xu; Zhichao Ma; Xinghui Wu

doi:10.1364/OEDI.2015.JW3A.48

International Photonics and OptoElectronics
OSA Technical Digest (online) (Optica Publishing Group, 2015),
paper JW3A.48
•https://doi.org/10.1364/OEDI.2015.JW3A.48

Fabrication of the porous silicon though a self-assembled porous alumina template

Zeping Li, Zhimou Xu, Zhichao Ma, and Xinghui Wu

Optoelectronic Devices and Integration 2015

Wuhan China
16–19 June 2015
ISBN: 978-1-943580-01-9

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Z. Li, Z. Xu, Z. Ma, and X. Wu, "Fabrication of the porous silicon though a self-assembled porous alumina template," in International Photonics and OptoElectronics, OSA Technical Digest (online) (Optica Publishing Group, 2015), paper JW3A.48.

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Abstract

We present the fabrication of porous silicon through a self-assembled porous alumina template(PAT) directly grown on the Si substrate. SEM and UV-vis spectrometer were used to characterize the morphology, size distribution and the reflectivity performance.

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