Abstract
By using conventional MEMS processes, we have successfully developed a high accuracy and easily controllable deformable mirror with simple structure. Our deformable mirror is driven by a single actuator different from a conventional deformable mirror of multi-actuator type. The deformed shape is controlled by giving strength distribution on the reverse side of the mirror. Furthermore, we have obtained a reflective film of low stress which had previously been a challenge.
© 2009 SPIE
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