From the session
Components and Testing (MC)
Yi Chiu, Chien-Hsun Huang, and Ying-Chien Hsu
A NA 0.65 microlens fabricated by focused ion beam milling in the silicon nitride film on a silicon substrate is presented. The measured NA is 0.64 and the focused spot size is 0.64 μm.
© 2007 OSA