Abstract

Recently, Tominaga et al. [1-3] proposed a scattering-mode super-resolution near-field structure (super-RENS) in which an AgOx layer is applied as a non-linear optical layer. During the readout by a laser of adequate power, nano-sized Ag particles are generated through the chemical decomposition of silver oxide. Localized surface plasmon coupling effect occurs between the silver particles and recording marks, which yields strong near-field intensity and improves the readability. [4,5] Based upon this working mechanism, the phase transition of AgO_x definitely plays an important part during the readout process. RF reactive magnetron sputtering has been widely used to produce the AgO_x layer. In this paper we studied the phase transition of AgO_x prepared at various flow ratios of O₂/(O₂+Ar) with and without protective layers.

© 2003 Optical Society of America