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Conferences > OC > 2003 > OWB > OWB3

On-chip optical clock signal distribution

J-F. Zheng, F. H. Robertson, E. Mohammed, I. Young, D. Ahn, K. Wada, J. Michel, and L.C. Kimerling

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Abstract

SiOxNy waveguide-based optical clocking signal distributions with 64-nodes were fabricated in 3mmx5mm Silicon chip area. The network circuitry consists of 3-levels of waveguide H-trees with decreasing bending radii. A novel splitter structure demonstrates < 3% loss at split and 49:51 power splitting uniformity.

© 2003 Optical Society of America

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