M. Roussey, P. Stenberg, A. Bera, M. Kuittinen, and S. Honkanen, "TiO2-filled Merged Photonic Crystal - Slot Waveguide,"
in Advanced Photonics 2013, S. Chandrasekhar, M. Jinno, and G. Raybon, eds.,
OSA Technical Digest (online)
(Optical Society of America, 2013), paper JT3A.14.
We propose and investigate a Silicon slotted Bragg grating waveguide coated with Titanium dioxide by Atomic Layer Deposition. The theoretical study, the fabrication process and the characterization are presented.