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Conferences > NOMA > 2018 > NoW1D > NoW1D.3

Mid-Infrared Microspectrometers Based on an Array of Differently Tuned Integrated Metamaterial Absorbers

M. Ghaderi, E. Karimi, and R. F. Wolffenbuttel

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Abstract

Integration of an array of differently tuned mid-infrared metamaterial-based absorbers on top of thermopile detector arrays in a compatible fabrication process is presented. UV lithography is used for patterning over large areas with high throughput.

© 2018 The Author(s)

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