Polymeric optical waveguides fabrication by direct write electron beam lithography

Jun Zhou; Jun Zhou; W. H. Wong; E. Y. B. Pun

doi:10.1364/NLGW.2001.MC6

Nonlinear Guided Waves and Their Applications
2001 OSA Technical Digest Series (Optica Publishing Group, 2001),
paper MC6
•https://doi.org/10.1364/NLGW.2001.MC6

Polymeric optical waveguides fabrication by direct write electron beam lithography

Jun Zhou, W. H. Wong, and E. Y. B. Pun

Nonlinear Guided Waves and Their Applications 2001

Clearwater, Florida United States
ISBN: 1-55752-670-2

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J. Zhou, W. H. Wong, and E. Y. B. Pun, "Polymeric optical waveguides fabrication by direct write electron beam lithography," in Nonlinear Guided Waves and Their Applications, 2001 OSA Technical Digest Series (Optica Publishing Group, 2001), paper MC6.

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Abstract

Rib-type single-mode channel waveguides using the polymer SU8C were fabricated by direct write electron beam lithography. The propagation loss of the channel waveguides was measured and found to be 0.22dB/cm and 0.48dB/cm at 1.31 um and 1.55 um, respectively.

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