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Conferences > NANO > 2006 > JWA > JWA3

Fabrication control of the resonance frequencies of high- index-contrast microphotonic cavities

Tymon Barwicz, Miloš A. Popović, Peter T. Rakich, Michael R. Watts, Franz X. Kärtner, Erich P. Ippen, and Henry I. Smith.

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Abstract

Microphotonic filters require precise control of the relative resonance frequencies of integrated dielectric micro-cavities. Using high-index-contrast microring resonators, we present, demonstrate, and analyze techniques allowing small and accurate corrections of resonance frequencies at fabrication.

© 2006 Optical Society of America

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