Abstract

A relevant problem in point-by-point surface metrology is to find the set of points minimizing the overall measurement time. We show, through mathematical arguments, that selecting the sampling points along circle involutes is a good choice.

© 2019 The Author(s)

PDF Article
More Like This
Optimized Metrology for Accurate Laser Damage Measurements

L. Gallais and J. V. Natoli
CMT7 Conference on Lasers and Electro-Optics (CLEO) 2002

Fitting Surface Metrology Data: Is it Alignment, Radius, or Irregularity Error?

Paul E. Murphy, Chris Supranowitz, and Jacob Siegel
OW4A.2 Optical Fabrication and Testing (OFT) 2019

Novel self-referencing time-domain THz ellipsometer for measurement of samples in aqueous environments

Shane Smith, Erich Rohwer, and Pieter Neethling
cc_p_21 The European Conference on Lasers and Electro-Optics (CLEO_Europe) 2019

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription