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Conferences > MATH > 2017 > JTu5A > JTu5A.29

Non-Destructive Surface Profilometry By First Reflection Localization Using Spectral Domain Optical Coherence Tomography

Nyasha J. Suliali, Peter Baricholo, Pieter H. Neethling, and Erich G. Rohwer

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Abstract

Surface profilometry of optical elements often leads to sample integrity degeneration when carried out using mechanical techniques. A Spectral-Domain Optical Coherence Tomography profilometer was developed and topography structure of a 160 μm-thick step-function-surfaced sample obtained.

© 2017 Optical Society of America

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